METHOD AND APPARATUS FOR NON-INVASIVE MEASUREMENT AND ANALYS OF SEMICONDUCTOR PLASMA PARAMETERS

Details for Australian Patent Application No. 2003247538 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors PARSONS, Richard

Pub. Number AU-A-2003247538

PCT Number PCT/US03/19039

PCT Pub. Number WO2004/006284

Priority 60/393,105 03.07.02 US

Filing date 18 June 2003

Wipo publication date 23 January 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 60/393,105 03.07.02 US

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003247538

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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