METHOD FOR PREPARATION OF ALUMINUM OXIDE THIN FILM

Details for Australian Patent Application No. 2003247207 (hide)

Owner KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY

Inventors CHUNG, Taek-Mo; CHO, Wontae; SUNG, Kiwhan; KIM, Yunsoo; AN, KiSeok; LEE, Sun Sook

Pub. Number AU-A-2003247207

PCT Number PCT/KR03/01511

PCT Pub. Number WO2004/013377

Priority 10-2002-0045746 02.08.02 KR

Filing date 29 July 2003

Wipo publication date 23 February 2004

International Classifications

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 10-2002-0045746 02.08.02 KR

1 April 2004 Application Open to Public Inspection

  Published as AU-A-2003247207

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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