METHOD OF MANUFACTURING OF A MONOLITHIC SILICON ACCELERATION SENSOR

Details for Australian Patent Application No. 2003246424 (hide)

Owner VTI TECHNOLOGIES OY

Inventors MAHON, Geoffrey, L.

Pub. Number AU-A-2003246424

PCT Number PCT/EP03/06238

PCT Pub. Number WO2003/107014

Priority 10/171,994 17.06.02 US

Filing date 13 June 2003

Wipo publication date 31 December 2003

International Classifications

G01P 015/00 Measuring acceleration

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 10/171,994 17.06.02 US

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003246424

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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