HIGH-SPEED DIAMOND GROWTH USING A MICROWAVE PLASMA IN PULSED MODE

Details for Australian Patent Application No. 2003246370 (hide)

Owner CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS-

Inventors GICQUEL, Alix, Helene; SILVA, Francois; DUTEN, Xavier; HASSOUNI, Khaled; LOMBARDI, Guillaume, Vincent; ROUSSEAU, Antoine

Pub. Number AU-A-2003246370

PCT Number PCT/EP03/07142

PCT Pub. Number WO2004/063430

Priority 03 00254 10.01.03 FR

Filing date 18 June 2003

Wipo publication date 10 August 2004

International Classifications

C30B 025/10 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

C23C 016/511 Chemical deposition or plating by decomposition

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

C30B 029/04 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Diamond

C23C 016/27 Chemical deposition or plating by decomposition

Event Publications

2 October 2003 Complete Application Filed

  Priority application(s): 03 00254 10.01.03 FR

9 September 2004 Application Open to Public Inspection

  Published as AU-A-2003246370

18 August 2005 Corrigenda

  Applications OPI - Corrigenda Name Index Under the name CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS-, Application No. 2003246370, under INID (71) correct the name to read UNIVERSITE PARIS NORD (PARIS XIII) INSTITUT GALILEE; CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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