APPARATUS FOR FORMING FILM

Details for Australian Patent Application No. 2003246246 (hide)

Owner KABUSHIKI KAISHA WATANABE SHOKO SUGINO, Takashi

Inventors KUSUHARA, Masaki; UMEDA, Masaru; SUGINO, Takashi

Pub. Number AU-A-2003246246

PCT Number PCT/JP03/08421

PCT Pub. Number WO2004/006313

Priority 2002-196067 04.07.02 JP

Filing date 2 July 2003

Wipo publication date 23 January 2004

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 2002-196067 04.07.02 JP

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003246246

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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