PROCESSING DEVICE AND PROCESSING METHOD

Details for Australian Patent Application No. 2003246171 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors KONISHI, Nobuo; IWASHITA, Mitsuaki

Pub. Number AU-A-2003246171

PCT Number PCT/JP03/08352

PCT Pub. Number WO2004/006318

Priority 2002-198353 08.07.02 JP

Filing date 1 July 2003

Wipo publication date 23 January 2004

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 2002-198353 08.07.02 JP

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003246171

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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