METHOD FOR DETERMINING WAVEFRONT ABERRATIONS

Details for Australian Patent Application No. 2003245886 (hide)

Owner CARL ZEISS SMT AG

Inventors EMER, Wolfgang; GRAUPNER, Paul

Pub. Number AU-A-2003245886

PCT Number PCT/EP03/05283

PCT Pub. Number WO2003/100525

Priority 102 24 363.8 24.05.02 DE

Filing date 20 May 2003

Wipo publication date 12 December 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01M 011/02 Testing of optical apparatus - Testing of optical properties

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 102 24 363.8 24.05.02 DE

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003245886

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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