PLASMA PROCESSOR WITH ELECTRODE SIMULTANEOUSLY RESPONSIVE TO PLURAL FREQUENCIES

Details for Australian Patent Application No. 2003245583 (hide)

Owner LAM RESEARCH CORPORATION

Inventors ELLINGBOE, Bert; KUTHI, Andy; FISCHER, Andreas; VAHEDI, Vahid; LOEWENHARDT, Peter

Pub. Number AU-A-2003245583

PCT Number PCT/US03/19366

PCT Pub. Number WO2004/003963

Priority 10/180,978 27.06.02 US

Filing date 20 June 2003

Wipo publication date 19 January 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 10/180,978 27.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003245583

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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