SYSTEM AND PROCESS FOR CALIBRATING TEMPERATURE MEASUREMENT DEVICES IN THERMAL PROCESSING CHAMBERS

Details for Australian Patent Application No. 2003245390 (hide)

Owner MATTSON TECHNOLOGY, INC.

Inventors TIMANS, Paul, Janis

Pub. Number AU-A-2003245390

PCT Number PCT/US03/17452

PCT Pub. Number WO2004/001840

Priority 10/178,950 24.06.02 US

Filing date 3 June 2003

Wipo publication date 6 January 2004

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 10/178,950 24.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003245390

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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