PLASMA GENERATION AND PROCESSING WITH MULTIPLE RADIATION SOURCES

Details for Australian Patent Application No. 2003245263 (hide)

Owner DANA CORPORATION

Inventors KUMAR, Satyendra; KUMAR, Devendra

Pub. Number AU-A-2003245263

PCT Number PCT/US03/14038

PCT Pub. Number WO2003/096771

Priority 60/378,693 08.05.02 US; 60/430,677 04.12.02 US; 60/435,278 23.12.02 US

Filing date 7 May 2003

Wipo publication date 11 November 2003

International Classifications

H05H 001/46 Generating plasma - using applied electromagnetic fields, e.g. high frequency or microwave energy

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

25 September 2003 Complete Application Filed

  Priority application(s): 60/378,693 08.05.02 US; 60/430,677 04.12.02 US; 60/435,278 23.12.02 US

15 January 2004 Application Open to Public Inspection

  Published as AU-A-2003245263

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

3 December 2009 Corrigenda

  Applications OPI - Name Index Under the name DANA CORPORATION, Application No. 2003245263, under INID (43) correct the publication date to read 24.11.2003

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