APPARATUS AND METHOD FOR MEASUREMENT OF FILM THICKNESS USING IMPROVED FAST FOURIER TRANSFORMATION

Details for Australian Patent Application No. 2003245067 (hide)

International Classifications

Event Publications

25 September 2003 Complete Application Filed

Priority application(s): 10-2003-0001854 11.01.03 KR

9 September 2004 Application Open to Public Inspection

Published as AU-A-2003245067

13 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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