COATING DEVICE AND COATING METHOD

Details for Australian Patent Application No. 2003244462 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors CHUNG, Gishi; TANAKA, Michio

Pub. Number AU-A-2003244462

PCT Number PCT/JP03/01051

PCT Pub. Number WO2003/066238

Priority 2002-30829 07.02.02 JP

Filing date 3 February 2003

Wipo publication date 2 September 2003

International Classifications

B05C 011/08 Component parts, details or accessories not specifically provided for in groups - Spreading liquid or other fluent material by manipulating the work, e.g. tilting

B05C 009/06 Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by groups , or in which the means of applying the liquid or other fluent material is not important

B05C 009/14 Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by groups , or in which the means of applying the liquid or other fluent material is not important - the auxiliary operation involving heating

B05D 003/00 Pretreatment of surfaces to which liquids or other fluent materials are to be applied

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

18 September 2003 Complete Application Filed

  Priority application(s): 2002-30829 07.02.02 JP

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003244462

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003244463-2,4,6-TRIAMINO-1,3,5-TRIAZINE DERIVATIVE

2003244461-ORGANIC SUBSTANCE HAVING FERRITE BONDED THERETO AND PROCESS FOR PRODUCING THE SAME