OPTICAL INTEGRATOR, ILLUMINATION OPTICAL DEVICE, EXPOSURE APPARATUS, AND EXPOSURE METHOD

Details for Australian Patent Application No. 2003244222 (hide)

Owner NIKON CORPORATION

Inventors TOYODA, Mitsunori

Pub. Number AU-A-2003244222

PCT Number PCT/JP03/07691

PCT Pub. Number WO2004/008507

Priority 2002-204655 12.07.02 JP

Filing date 17 June 2003

Wipo publication date 2 February 2004

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G02B 013/00 Optical objectives specially designed for the purposes specified below

G02B 019/00 Condensers

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

18 September 2003 Complete Application Filed

  Priority application(s): 2002-204655 12.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003244222

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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