SUBSTRATE PROCESSING DEVICE

Details for Australian Patent Application No. 2003243974 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ITOH, Norihiro; KAWAGUCHI, Hiroaki; CHOUNO, Yasuhiro

Pub. Number AU-A-2003243974

PCT Number PCT/JP03/08048

PCT Pub. Number WO2004/001830

Priority 2002-184378 25.06.02 JP

Filing date 25 June 2003

Wipo publication date 6 January 2004

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-184378 25.06.02 JP

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003243974

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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