REACTIVE AQUEOUS METAL OXIDE SOLS AS POLISHING SLURRIES FOR LOW DIELECTRIC CONSTANT MATERIALS

Details for Australian Patent Application No. 2003243740 (hide)

International Classifications

Event Publications

11 September 2003 Complete Application Filed

Priority application(s): 10/214,677 07.08.02 US

8 April 2004 Application Open to Public Inspection

Published as AU-A-2003243740

21 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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