SILICON WAFER POLISHING HOLDER AND METHOD OF USE THEREOF

Details for Australian Patent Application No. 2003243569 (hide)

Owner NGUYEN, Phuong, Van

Inventors NGUYEN, Phuong, Van

Pub. Number AU-A-2003243569

PCT Number PCT/US03/18814

PCT Pub. Number WO2005/007339

Filing date 16 June 2003

Wipo publication date 4 February 2005

International Classifications

B24B 001/00

Event Publications

11 September 2003 Complete Application Filed

17 March 2005 Application Open to Public Inspection

  Published as AU-A-2003243569

2 March 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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