HAFNIUM-ALUMINUM OXIDE DIELECTRIC FILMS

Details for Australian Patent Application No. 2003243407 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors AHN, Kie, Y.; FORBES, Leonard

Pub. Number AU-A-2003243407

PCT Number PCT/US03/17730

PCT Pub. Number WO2003/105205

Priority 10/163,481 05.06.02 US

Filing date 5 June 2003

Wipo publication date 22 December 2003

International Classifications

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/51 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/163,481 05.06.02 US

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003243407

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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