FABRICATION OF DUCTILE INTERMETALLIC SPUTTERING TARGETS

Details for Australian Patent Application No. 2003243332 (hide)

Owner HERAEUS, INC.

Inventors ZHANG, Willy; CORNO, Philip; SANDLIN, Michael; KUNKEL, Bernd

Pub. Number AU-A-2003243332

PCT Number PCT/US03/16827

PCT Pub. Number WO2003/104522

Priority 60/386,433 07.06.02 US

Filing date 29 May 2003

Wipo publication date 22 December 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 60/386,433 07.06.02 US

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003243332

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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