COOLING MECHANISMS FOR SHAFT COUPLED TO A ROTARY SEAL

Details for Australian Patent Application No. 2003243309 (hide)

Owner IBIS TECHNOLOGY CORPORATION

Inventors RICHARDS, Steven; LEAVITT, William; MUKA, Richard

Pub. Number AU-A-2003243309

PCT Number PCT/US03/16544

PCT Pub. Number WO2003/102261

Priority 10/157,687 29.05.02 US

Filing date 27 May 2003

Wipo publication date 19 December 2003

International Classifications

C23C 014/50 Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

H01J 037/20 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Means for supporting or positioning the object or the material

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

F16J 015/16 Sealings - between relatively-moving surfaces

F16J 015/43 Sealings

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/157,687 29.05.02 US

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003243309

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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