PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Details for Australian Patent Application No. 2003243016 (hide)

Owner MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventors IWAI, Tetsuhiro; ARITA, Kiyoshi

Pub. Number AU-A-2003243016

PCT Number PCT/JP03/08930

PCT Pub. Number WO2004/010456

Priority 2002-209052 18.07.02 JP

Filing date 14 July 2003

Wipo publication date 9 February 2004

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-209052 18.07.02 JP

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003243016

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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