ELECTROLESS PLATING APPARATUS AND POST-ELECTROLESS PLATING CLEANING METHOD

Details for Australian Patent Application No. 2003243015 (hide)

Owner EBARA CORPORATION

Inventors WANG, Xinming; TAKAGI, Daisuke; KATAKABE, Ichiro; INOUE, Yuki

Pub. Number AU-A-2003243015

PCT Number PCT/JP03/08604

PCT Pub. Number WO2004/006305

Priority 2003-24944 31.01.03 JP; 2002-197684 05.07.02 JP

Filing date 7 July 2003

Wipo publication date 23 January 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 018/16 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating - by reduction or substitution, i.e. electroless plating

B08B 001/04 Cleaning by methods involving the use of tools, brushes, or analogous members - using rotary operative members

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2003-24944 31.01.03 JP; 2002-197684 05.07.02 JP

11 March 2004 Application Open to Public Inspection

  Published as AU-A-2003243015

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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