ROTARY MACHINE FOR CVD COATINGS

Details for Australian Patent Application No. 2003242577 (hide)

Owner CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS

Inventors BEHLE, Stephan; LUTTRINGHAUS-HENKEL, Andreas; ARNOLD, Gregor; BICKER, Matthias; KLEIN, Jurgen

Pub. Number AU-A-2003242577

PCT Number PCT/EP03/05499

PCT Pub. Number WO2003/100129

Priority 102 25 607.1 07.06.02 DE; 102 24 395.6 01.06.02 DE; 102 25 985.2 11.06.02 DE; 102 53 512.4 16.11.02 DE; 102 53 513.2 16.11.02 DE; 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE

Filing date 26 May 2003

Wipo publication date 12 December 2003

International Classifications

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C23C 016/04 Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 102 25 607.1 07.06.02 DE; 102 24 395.6 01.06.02 DE; 102 25 985.2 11.06.02 DE; 102 53 512.4 16.11.02 DE; 102 53 513.2 16.11.02 DE; 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003242577

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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