POLISHING FLUID AND METHOD OF POLISHING

Details for Australian Patent Application No. 2003241919 (hide)

Owner HITACHI CHEMICAL CO., LTD.

Inventors TERAZAKI, Hiroki; KURATA, Yasushi; KAMIGATA, Yasuo; ANZAI, Sou

Pub. Number AU-A-2003241919

PCT Number PCT/JP03/06769

PCT Pub. Number WO2003/103033

Priority 2002-161327 03.06.02 JP

Filing date 29 May 2003

Wipo publication date 19 December 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-161327 03.06.02 JP

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003241919

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003241920-Antimicrobial envelopes

2003241918-HAIR FASTENER