METHOD OF ELECTROLESS PLATING

Details for Australian Patent Application No. 2003241759 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MARUMO, Yoshinori

Pub. Number AU-A-2003241759

PCT Number PCT/JP03/06500

PCT Pub. Number WO2004/031447

Priority 2002-293913 07.10.02 JP

Filing date 23 May 2003

Wipo publication date 23 April 2004

International Classifications

C23C 018/31 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating - Coating with metals

H01L 021/288 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-293913 07.10.02 JP

27 May 2004 Application Open to Public Inspection

  Published as AU-A-2003241759

23 June 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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