POSITION MEASUREMENT METHOD, EXPOSURE METHOD, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

Details for Australian Patent Application No. 2003241737 (hide)

Owner NIKON CORPORATION

Inventors KOBAYASHI, Mitsuru

Pub. Number AU-A-2003241737

PCT Number PCT/JP03/06941

PCT Pub. Number WO2003/104746

Priority 2002-159660 31.05.02 JP

Filing date 2 June 2003

Wipo publication date 22 December 2003

International Classifications

G01B 011/00 Measuring arrangements characterised by the use of optical means

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 2002-159660 31.05.02 JP

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003241737

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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