SYSTEM AND APPARATUS FOR CONTROL OF SPUTTER DEPOSITION PROCESS

Details for Australian Patent Application No. 2003241458 (hide)

Event Publications

11 September 2003 Complete Application Filed

Priority application(s): 60/381,482 17.05.02 US; 10/438,380 15.05.03 US

29 January 2004 Application Open to Public Inspection

Published as AU-A-2003241458

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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