CHARGED PARTICLE BEAM COLUMN AND METHOD FOR DIRECTING A CHARGED PARTICLE BEAM

Details for Australian Patent Application No. 2003241427 (hide)

Owner APPLIED MATERIALS, INC.

Inventors PETROV, Igor; ROSENBERG, Zvika

Pub. Number AU-A-2003241427

PCT Number PCT/US03/14974

PCT Pub. Number WO2003/100815

Priority 10/154,530 22.05.02 US

Filing date 12 May 2003

Wipo publication date 12 December 2003

International Classifications

H01J 037/147 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Arrangements for directing or deflecting the discharge along a desired path

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/154,530 22.05.02 US

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003241427

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

  Applications OPI - Name Index Under the name APPLIED MATERIALS, INC., Application No. 2003241427, under INID (71) correct the name to read APPLIED MATERIALS, INC.; APPLIED MATERIALS ISRAEL, LTD.

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