METHOD FOR THE TARGETED DEFORMATION OF AN OPTICAL ELEMENT

Details for Australian Patent Application No. 2003240653 (hide)

Owner CARL ZEISS SMT AG

Inventors LIPPERT, Johannes; MUHLBEYER, Michael; FRITZSCHE, Steffen; FEHR, Jean-Noel; KIRCHNER, Harald

Pub. Number AU-A-2003240653

PCT Number PCT/EP03/05113

PCT Pub. Number WO2003/098350

Priority 102 22 331.9 18.05.02 DE

Filing date 15 May 2003

Wipo publication date 2 December 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/18 Mountings, adjusting means, or light-tight connections, for optical elements - for prisms

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 102 22 331.9 18.05.02 DE

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003240653

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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