METHOD OF MAKING AN SOI SEMICONDUCTOR DEVICE HAVING ENHANCED, SELF-ALIGNED DIELECTRIC REGIONS IN THE BULK SILICON SUBSTRATE

Details for Australian Patent Application No. 2003240569 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors WEI, Andy, C.; WRISTERS, Derick, J.; FUSELIER, Mark, B.

Pub. Number AU-A-2003240569

PCT Number PCT/US03/17917

PCT Pub. Number WO2003/103040

Priority 10/162,299 04.06.02 US

Filing date 28 May 2003

Wipo publication date 19 December 2003

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/84 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/12 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/162,299 04.06.02 US

12 February 2004 Application Open to Public Inspection

  Published as AU-A-2003240569

24 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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