ELECTRODE DESIGN FOR STABLE MICRO-SCALE PLASMA DISCHARGES

Details for Australian Patent Application No. 2003240520 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors VONALLMEN, Paul, A.

Pub. Number AU-A-2003240520

PCT Number PCT/US03/17521

PCT Pub. Number WO2003/107381

Priority 10/174,234 18.06.02 US

Filing date 4 June 2003

Wipo publication date 31 December 2003

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/174,234 18.06.02 US

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003240520

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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