METHOD OF PREVENTING SHIFT OF ALIGNMENT MARKS DURING RAPID THERMAL PROCESSING

Details for Australian Patent Application No. 2003239942 (hide)

Owner ATMEL CORPORATION

Inventors LOJEK, Bohumil; WHITEMAN, Michael, D.

Pub. Number AU-A-2003239942

PCT Number PCT/US03/17404

PCT Pub. Number WO2004/010493

Priority 10/201,093 22.07.02 US

Filing date 2 June 2003

Wipo publication date 9 February 2004

International Classifications

H01L 021/76 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/201,093 22.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003239942

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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