DEVICE AND METHOD FOR THE ELECTRON BEAM ATTENUATION OF REACTIVELY FORMED LAYERS ON SUBSTRATES

Details for Australian Patent Application No. 2003239759 (hide)

International Classifications

Event Publications

11 September 2003 Complete Application Filed

Priority application(s): 102 28 925.5 25.06.02 DE; 102 21 816.1 10.05.02 DE

15 January 2004 Application Open to Public Inspection

Published as AU-A-2003239759

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

17 December 2009 Corrigenda

Applications OPI - Name Index Under the name Fraunhofer-Gesellschaft Zur forderung Der Angewan D Ten Forschung E.V., Application No. 2003239759, un- Corrigenda der INID (43) correct the publication date to read 24.11.2003

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