ENERGETIC NEUTRAL PARTICLE LITHOGRAPHIC APPARATUS AND PROCESS

Details for Australian Patent Application No. 2003239533 (hide)

Owner THE UNIVERSITY OF HOUSTON SYSTEM

Inventors WOLFE, John, C.; RUCHHOEFT, Paul

Pub. Number AU-A-2003239533

PCT Number PCT/US03/15936

PCT Pub. Number WO2003/100816

Priority 60/381,924 20.05.02 US; 60/381,925 20.05.02 US

Filing date 19 May 2003

Wipo publication date 12 December 2003

International Classifications

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 60/381,924 20.05.02 US; 60/381,925 20.05.02 US

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003239533

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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