PROTECTING GROUPS FOR LITHOGRAPHIC RESIST COMPOSITIONS

Details for Australian Patent Application No. 2003239123 (hide)

Owner MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventors FEDYNYSHYN, Theodore, H.; SWORIN, Michael; SINTA, Roger

Pub. Number AU-A-2003239123

PCT Number PCT/US03/06299

PCT Pub. Number WO2003/075092

Priority 60/360,972 01.03.02 US

Filing date 28 February 2003

Wipo publication date 16 September 2003

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 60/360,972 01.03.02 US

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003239123

27 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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