CONDUCTIVE ETCH STOP FOR ETCHING A SACRIFICIAL LAYER

Details for Australian Patent Application No. 2003238819 (hide)

Owner SILICON LIGHT MACHINES, INC.

Inventors HUNTER, James, A.

Pub. Number AU-A-2003238819

PCT Number PCT/US03/17027

PCT Pub. Number WO2004/003981

Priority 10/187,028 28.06.02 US

Filing date 30 May 2003

Wipo publication date 19 January 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/14 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 029/82 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 029/84 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/187,028 28.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003238819

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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