MONOLITHIC SILICON ACCELERATION SENSOR

Details for Australian Patent Application No. 2003238497 (hide)

Owner VTI TECHNOLOGIES OY

Inventors MAHON, Geoffrey, L.

Pub. Number AU-A-2003238497

PCT Number PCT/EP03/06144

PCT Pub. Number WO2003/107016

Priority 10/171,616 17.06.02 US

Filing date 12 June 2003

Wipo publication date 31 December 2003

International Classifications

G01P 015/18 Measuring acceleration - in two or more dimensions

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

G01P 015/125 Measuring acceleration - by capacitive pick-up

G01P 015/12 Measuring acceleration - by alteration of electrical resistance

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/171,616 17.06.02 US

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003238497

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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