Coating device comprising a conveying device

Details for Australian Patent Application No. 2003238400 (hide)

Owner CARL-ZEISS-STIFTUNG TRADING AS SCHOTT GLAS

Inventors Luttringhaus-Henkel, Andreas; Behle, Stephan; Bauch, Hartmut

Agent Cullens

Pub. Number AU-A-2003238400

PCT Number PCT/EP03/05498

PCT Pub. Number WO2003/100128

Priority 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE; 102 27 637.4 20.06.02 DE; 103 14 067.0 28.03.03 DE; 102 24 395.6 01.06.02 DE

Filing date 26 May 2003

Wipo publication date 12 December 2003

International Classifications

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C23C 016/04 Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 014/50 Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

C23C 014/04 Coating by vacuum evaporation, by sputtering or by ion implantation - Coating on selected surface areas, e.g. using masks

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 102 23 288.1 24.05.02 DE; 102 24 395.6 01.06.02 DE; 102 27 637.4 20.06.02 DE; 103 14 067.0 28.03.03 DE; 102 24 395.6 01.06.02 DE

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003238400

22 February 2007 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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