KINEMATIC LENS MOUNT WITH REDUCED CLAMPING FORCE AND LITHOGRAPHY SYSTEM

Details for Australian Patent Application No. 2003238223 (hide)

Owner NIKON CORPORATION

Inventors WATSON, Douglas, C.

Pub. Number AU-A-2003238223

PCT Number PCT/US03/18925

PCT Pub. Number WO2004/001478

Priority 60/390,884 21.06.02 US; 10/446,575 27.05.03 US

Filing date 17 June 2003

Wipo publication date 6 January 2004

International Classifications

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

G02B 007/185 Mountings, adjusting means, or light-tight connections, for optical elements

G02B 007/192 Mountings, adjusting means, or light-tight connections, for optical elements

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 60/390,884 21.06.02 US; 10/446,575 27.05.03 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003238223

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003238224-METHOD AND APPARATUS FOR ZERO-COPY RECEIVE BUFFER MANAGEMENT

2003238222-ANTISENSE MODULATION OF DUAL SPECIFIC PHOSPHATASE 4 EXPRESSION