METHOD FOR PATTERN INSPECTION

Details for Australian Patent Application No. 2003238155 (hide)

Owner TOKYO SEIMITSU CO., LTD.

Inventors GESHEL, Mark; SHMUELI, Niv; FRIEDMANN, Gideon; BREGMANAMITAI, Orna

Pub. Number AU-A-2003238155

PCT Number PCT/JP03/07378

PCT Pub. Number WO2003/104781

Priority 10/164,412 10.06.02 US

Filing date 10 June 2003

Wipo publication date 22 December 2003

International Classifications

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/164,412 10.06.02 US

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003238155

24 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

18 August 2005 Corrigenda

  Applications OPI - Name Index Under the name TOKYO SEIMITSU CO., LTD., Application No. 2003238155, under INID (71) correct the name to read TOKYO SEIMITSU CO., LTD.; ACCRETECH (ISRAEL) LTD.

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