PRODUCTIVITY ENHANCING THERMAL SPRAYED YTTRIACONTAINING COATING FOR PLASMA REACTOR

Details for Australian Patent Application No. 2003238006 (hide)

Owner LAM RESEARCH CORPORATION

Inventors O'DONNELL, Robert, J.; DAUGHERTY, John, E.

Pub. Number AU-A-2003238006

PCT Number PCT/US03/18502

PCT Pub. Number WO2004/003962

Priority 10/180,504 27.06.02 US

Filing date 12 June 2003

Wipo publication date 19 January 2004

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/180,504 27.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003238006

17 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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