GAS DISCHARGE ULTRAVIOLET WAVEMETER WITH ENHANCED ILLUMINATION

Details for Australian Patent Application No. 2003237901 (hide)

Owner CYMER, INC.

Inventors SANDSTROM, Richard, L.; MELCHIOR, John, T.; RAO, Rahasekhar

Pub. Number AU-A-2003237901

PCT Number PCT/US03/15994

PCT Pub. Number WO2003/107494

Priority 10/173,190 14.06.02 US

Filing date 23 May 2003

Wipo publication date 31 December 2003

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/173,190 14.06.02 US

26 February 2004 Application Open to Public Inspection

  Published as AU-A-2003237901

3 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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