METHODS AND COMPOSITIONS FOR ETCH CLEANING MICROELECTRONIC SUBSTRATES IN CARBON DIOXIDE

Details for Australian Patent Application No. 2003237814 (hide)

Owner MICELL TECHNOLOGIES, INC.

Inventors MCCLAIN, James, B.; DEYOUNG, James, P.; GROSS, Stephen, M.; WAGNER, Mark, I.

Pub. Number AU-A-2003237814

PCT Number PCT/US03/14735

PCT Pub. Number WO2003/097550

Priority 10/146,617 15.05.02 US

Filing date 13 May 2003

Wipo publication date 2 December 2003

International Classifications

C03C 023/00 Other surface treatment of glass not in the form of fibres or filaments

C23G 001/00 Cleaning or pickling metallic material with solutions or molten salts

C23G 001/02 Cleaning or pickling metallic material with solutions or molten salts - with acid solutions

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/146,617 15.05.02 US

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003237814

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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