METHOD AND DEVICE FOR PLASMA TREATING WORKPIECES

Details for Australian Patent Application No. 2003237688 (hide)

Owner CARL-ZEISS-STIFTUNG trading as SCHOTT GLAS

Inventors LEWIN, Frank; MULLER, Hartwig; VOGEL, Klaus; BEHLE, Stephan; LUTTRINGHAUS-HENKEL, Andreas; ARNOLD, Gregor; BICKER, Matthias; KLEIN, Jurgen; WALTHER, Marten; BAUCH, Hartmut; LITZENBERG, Michael

Pub. Number AU-A-2003237688

PCT Number PCT/EP03/05519

PCT Pub. Number WO2003/100122

Priority 102 25 607.1 07.06.02 DE; 102 25 609.8 07.06.02 DE; 102 25 985.2 11.06.02 DE; 102 27 637.4 20.06.02 DE; 102 29 529.8 01.07.02 DE; 102 34 374.8 27.07.02 DE; 102 23 288.1 24.05.02 DE; 102 24 546.0 31.05.02 DE; 102 24 395.6 01.06.02 DE; 102 24 547.9 31.05.02 DE; 102 24 395.6 01.06.02 DE

Filing date 26 May 2003

Wipo publication date 12 December 2003

International Classifications

C23C 016/04 Chemical deposition or plating by decomposition - Coating on selected surface areas, e.g. using masks

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C23C 016/54 Chemical deposition or plating by decomposition - Apparatus specially adapted for continuous coating

C03C 017/00 Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 102 25 607.1 07.06.02 DE; 102 25 609.8 07.06.02 DE; 102 25 985.2 11.06.02 DE; 102 27 637.4 20.06.02 DE; 102 29 529.8 01.07.02 DE; 102 34 374.8 27.07.02 DE; 102 23 288.1 24.05.02 DE; 102 24 546.0 31.05.02 DE; 102 24 395.6 01.06.02 DE; 102 24 547.9 31.05.02 DE; 102 24 395.6 01.06.02 DE

5 February 2004 Application Open to Public Inspection

  Published as AU-A-2003237688

10 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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