METHOD FOR PRODUCING SEMIINSULATING RESISTIVITY IN HIGH PURITY SILICON CARBIDE CRYSTALS

Details for Australian Patent Application No. 2003237489 (hide)

Owner CREE, INC.

Inventors MUELLER, Stephan, Georg; JENNY, Jason, Ronald; MALTA, David, Phillip; HOBGOOD, Hudson, McDonald

Pub. Number AU-A-2003237489

PCT Number PCT/US03/18068

PCT Pub. Number WO2004/001836

Priority 10/064,232 24.06.02 US

Filing date 10 June 2003

Wipo publication date 6 January 2004

International Classifications

H01L 021/324 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 033/02 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

C30B 029/36 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/064,232 24.06.02 US

4 March 2004 Application Open to Public Inspection

  Published as AU-A-2003237489

10 March 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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