CMP SYSTEMS AND METHODS UTILIZING AMINE-CONTAINING POLYMERS

Details for Australian Patent Application No. 2003237348 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors MOEGGENBORG, Kevin, J.; CHERIAN, Isaac, K.; BRUSIC, Vlasta

Pub. Number AU-A-2003237348

PCT Number PCT/US03/00822

PCT Pub. Number WO2003/062338

Priority 10/051,241 18.01.02 US

Filing date 13 January 2003

Wipo publication date 2 September 2003

International Classifications

C09G 001/02 Polishing compositions

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/051,241 18.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003237348

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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