METHOD FOR THE PRODUCTION OF NANOMETER SCALE STEP HEIGHT REFERENCE SPECIMENS

Details for Australian Patent Application No. 2003237270 (hide)

Owner THE GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE ADMINISTRATOR OF THE NATIONAL

Inventors ABEL, Phillip, G.; POWELL, J., Anthony; NEUDECK, Philip, G.

Pub. Number AU-A-2003237270

PCT Number PCT/US03/16799

PCT Pub. Number WO2004/010075

Priority 10/198,668 17.07.02 US

Filing date 29 May 2003

Wipo publication date 9 February 2004

International Classifications

G01B 007/34 Measuring arrangements characterised by the use of electric or magnetic means - for measuring roughness or irregularity of surfaces

C30B 033/00 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

C30B 029/36 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/198,668 17.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003237270

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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