METHOD AND APPARATUS FOR OPTICALLY MEASURING THE TOPOGRAPHY OF NEARLY PLANAR PERIODIC STRUCTURES

Details for Australian Patent Application No. 2003236819 (hide)

Owner LUKA OPTOSCOPE ApS

Inventors LARSEN, Niels, Agersnap; HANSEN, Poul-Erik

Pub. Number AU-A-2003236819

PCT Number PCT/DK03/00457

PCT Pub. Number WO2004/008069

Priority 60/395,324 12.07.02 US

Filing date 1 July 2003

Wipo publication date 2 February 2004

International Classifications

G01B 011/30 Measuring arrangements characterised by the use of optical means - for measuring roughness or irregularity of surfaces

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 60/395,324 12.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003236819

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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