METHOD AND DEVICE FOR MEASURING THE DIFFUSION LENGTH OF MINORITY CARRIERS IN A SEMICONDUCTOR SAMPLE

Details for Australian Patent Application No. 2003236654 (hide)

Owner HERMES, Uwe

Inventors HERMES, Uwe

Pub. Number AU-A-2003236654

PCT Number PCT/EP03/05086

PCT Pub. Number WO2003/098197

Priority 102 21 937.0 17.05.02 DE

Filing date 15 May 2003

Wipo publication date 2 December 2003

International Classifications

G01N 021/17 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Systems in which incident light is modified in accordance with the properties of the material investigated

G01R 031/265 Arrangements for testing electric properties

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 102 21 937.0 17.05.02 DE

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003236654

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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