ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY

Details for Australian Patent Application No. 2003236640 (hide)

Owner CARL ZEISS SMT AG

Inventors WIETZORREK, Jochen; HAINZ, Joachim; SINGER, Wolfgang; WANGLER, Johannes; ANTONI, Martin; SCHULTZ, Jorg; DINGER, Udo; SCHUSTER, Karl-Heinz

Pub. Number AU-A-2003236640

PCT Number PCT/EP03/04971

PCT Pub. Number WO2003/098349

Priority 10/150,650 17.05.02 US

Filing date 13 May 2003

Wipo publication date 2 December 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/150,650 17.05.02 US

29 January 2004 Application Open to Public Inspection

  Published as AU-A-2003236640

3 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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