METHOD OF CREATING HIGHQUALITY RELAXED SiGeON-INSULATOR FOR STRAINED Si CMOS APPLICATIONS

Details for Australian Patent Application No. 2003236565 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors SADANA, Devendra, K.; OTT, John, Albrecht; BEDELL, Stephen, W.; CHU, Jack, O.; FOGEL, Keith, E.; KOESTER, Stephen, J.

Pub. Number AU-A-2003236565

PCT Number PCT/US03/01431

PCT Pub. Number WO2003/063229

Priority 10/055,138 23.01.02 US

Filing date 16 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/331 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

11 September 2003 Complete Application Filed

  Priority application(s): 10/055,138 23.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003236565

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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